REVIEW OF SCIENTIFIC INSTRUMENTS 76, 061101 共2005兲 REVIEW ARTICLE Nanoelectromechanical systems K. L. Ekincia兲 Department of Aerospace - Nanoelectromechanical systems - Document - PDFSEARCH.IO

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	REVIEW OF SCIENTIFIC INSTRUMENTS 76, 061101 共2005兲 REVIEW ARTICLE Nanoelectromechanical systems K. L. Ekincia兲 Department of Aerospace & Mechanical Engineering, Boston University, Boston, Massachusetts 02215 Add to Reading List Document Date: 2005-07-04 14:46:28 Open Document File Size: 671,17 KB Share Result on Facebook

REVIEW OF SCIENTIFIC INSTRUMENTS 76, 061101 共2005兲 REVIEW ARTICLE Nanoelectromechanical systems K. L. Ekincia兲 Department of Aerospace & Mechanical Engineering, Boston University, Boston, Massachusetts 02215Add to Reading List