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Date: 2008-12-11 11:11:36 Technology Thin film deposition Chemistry Plasma processing Nanolithography Sputter deposition Coating Photolithography Nano and Micro Devices Center Materials science Microtechnology Semiconductor device fabrication		Microsoft PowerPoint - kostas equipment overview Add to Reading List Source URL: www.kostas.neu.edu Download Document from Source Website File Size: 3,27 MB Share Document on Facebook

	Fabrication of Silicon Nanowire Arrays by Soft Nanosphere Lithography Master Thesis (6 months) Silicon nanowires (NWs) are increasingly used in many technological applications, including the fabrication of platforms to s DocID: 1lIpd - View Document
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