PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering - Multiphysics - Document - PDFSEARCH.IO

First Page		Document Content
Microtechnology Nanotechnology Nanoelectromechanical system Nanoelectronics Microelectromechanical systems University of Illinois at Urbana–Champaign Beckman Institute Micro-opto-mechanical systems RF MEMS Champaign County Illinois Materials science Illinois		PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering Add to Reading List Source URL: www.purdue.edu Download Document from Source Website File Size: 222,87 KB Share Document on Facebook

	Product Summary Guide Precision Power Analog It’s an exciting future for precision power analog! Apex Microtechnology is an industry leader for high-performance power DocID: 1v5qH - View Document
	Electronic Devices on Various Substrates: Fabrication of Releasable SingleCrystal SiliconMetal Oxide FieldEffect Devices and Their Deterministic Assembly on Foreign Substrates (Adv. Funct. Mater) DocID: 1rrrV - View Document
	Optimization of Electrode Configuration in Surface-Parallel Actuated Deformable Mirrors Marie Laslandesa , Sergio Pellegrinoa , John Steevesa , Keith Pattersonb a California Institute of Technology, 1200 E. California Bl DocID: 1rh2k - View Document
	Heat Load Experiments at CAMD and CLS D. Yemane1, S. Achenbach2, J. Goettert1, R. Guntaka3, D. Haluzan2, K. Nandakumar3, V. Singh1, V. Subramanian2, G. Wells2 1 LSU Center for Advanced Microstructures and Devices (CAMD), DocID: 1rdcU - View Document
	Microsoft Word - 03-YCai_MEMSIC_CStudy_jw6_dh1_20081023.doc DocID: 1r6kx - View Document