Monolithic fabrication of millimeter-scale machines

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Date: 2012-05-23 11:36:44 Technology Transducers Semiconductor device fabrication RF MEMS Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Sensor Microtechnology Materials science Nanotechnology		Monolithic fabrication of millimeter-scale machines Add to Reading List Source URL: micro.seas.harvard.edu Download Document from Source Website File Size: 2,92 MB Share Document on Facebook

	Didier Lacroix, Observer AnaCatum Design AB Mr. Lacroix serves as advisor and investor into disruptive semiconductor technology startups (i.e MEMS, NANO, Analog / RF IP). He has been MicroGen System’s strategic busines DocID: 1lEXe - View Document
	Hermetic Wafer-Level Packaging development for RF MEMS switch C. Ferrandon1*, F. Greco1, E. Lagoutte1, P. Descours1, G. Enyedy1, M. Pellat1, C. Gillot1, P. Rey1, D. Mercier1, M. Cueff1, X. Baillin1, F. Perruchot1, N. Sil DocID: 1g8Us - View Document
	Monolithic fabrication of millimeter-scale machines DocID: 1fUva - View Document
	Miniaturization – A paradigm shift in advanced manufacturing and education** Tai-Ran Hsu, Ph.D. ASME Fellow and Member of IEEE Microsystems Design and Packaging Laboratory Department of Mechanical and Aerospace Enginee DocID: 1fNtY - View Document
	Proceedings of IPAC2013, Shanghai, China WEPFI012 CONCEPTUAL DESIGN OF ILSF RF SYSTEM Kh. Sarhadi*, H. Ajam, H. Azizi, M. Fereidani, M. Jafarzadeh, S. Pirani, R. Safian, A. Shahverdi, DocID: 1fI1D - View Document