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Microtechnology / Nanotechnology / Electrical engineering / Mechanical engineering / Microelectromechanical systems / Wetting / Wafer / Hydrophobe / RF MEMS / Chemistry / Materials science / Semiconductor device fabrication
Date: 2006-03-06 21:34:39
Microtechnology
Nanotechnology
Electrical engineering
Mechanical engineering
Microelectromechanical systems
Wetting
Wafer
Hydrophobe
RF MEMS
Chemistry
Materials science
Semiconductor device fabrication

INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING doi:[removed][removed]

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Source URL: www.ee.washington.edu

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