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Date: 2011-02-17 10:25:06 Microtechnology Materials science Polydimethylsiloxane Silicones Siloxanes Soft lithography Photoresist Nanoimprint lithography Photolithography Etching Photonic metamaterial		www.advmat.de COMMUNICATION www.MaterialsViews.com Add to Reading List Source URL: rogers.matse.illinois.edu Download Document from Source Website File Size: 761,65 KB Share Document on Facebook

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