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#	Item
521	Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY OMNIDIRECTIONAL WALKING MICROROBOT REALIZED BY THERMAL MICROACTUATOR ARRAYS Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2001-08-22 14:51:00 Technology Microbotics Microelectromechanical systems Micromachinery Robotics Valve actuator Microtechnology Materials science Actuators
522	A THEORY OF MANIPULATION AND CONTROL FOR MICROFABRICATED ACTUATOR ARRAYS Karl-Friedrich Bohringer Bruce R. Donald Robotics & Vision Laboratory Department of Computer Science Cornell University Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:38:00 Nanotechnology Technology Robotics Microfabrication Microelectromechanical systems Micromachinery Microtechnology Materials science Actuators
523	This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 1 An Electrostatic Zigzag Transm Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-01-22 07:55:51 Microelectromechanical systems Comb drive Zigzag Microlens Shutter Microtechnology Materials science Technology
524	Micro-optical Components for a MEMS Integrated Display Kerwin Wanga, Khye-Suian Weia, Mike Sinclairb and Karl F. Böhringera a Electrical Engineering Department, University of Washington, Seattle, WA 98195, USA b Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-09-15 02:50:27 Physics Microelectromechanical systems Microlens Grating light valve Optical switch Plasma Micro-Opto-Electro-Mechanical Systems Microscanner Microtechnology Materials science Technology
525	A FULLY DRY SELF-ASSEMBLY PROCESS WITH PROPER IN-PLANE ORIENTATION Sangjun Park and Karl F. Bö Böhringer Department of Electrical Engineering University of Washington, Seattle, WA[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2008-01-10 14:48:22 Technology Deep reactive-ion etching Etching Microfabrication Wafer Isotropic etching Passivation Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
526	Global Concepts for Local Markets Welcome to the 6th Smart Systems Integration Conference 2012! Add to Reading List Source URL: www.smart-systems-integration.org Language: English - Date: 2012-03-30 07:06:19 Emerging technologies Microtechnology Smart system Systems engineering Micro-Opto-Electro-Mechanical Systems OLED CMOS Robert Bosch GmbH Wireless sensor network Technology Electronics Electronic engineering
527	SSI2012_Kongressprogramm_161211_end_Layout[removed]:57 Seite 1 International Conference and Exhibition on Integration Issues of Miniaturized Systems Zurich, Switzerland, 21 – 22 March 2012 Add to Reading List Source URL: www.smart-systems-integration.org Language: English - Date: 2012-01-15 12:31:43 Science Laboratories Smart system Systems engineering Microelectromechanical systems Fraunhofer Society Ambient intelligence IMTEK Microsystem Microtechnology Materials science Technology
528	SELF-ASSEMBLY OF MICRO PUMPS WITH HIGH UNIFORMITY IN PERFORMANCE Jiandong Fang, Kerwin Wang, Karl F. Böhringer Department of Electrical Engineering University of Washington Seattle, WA[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-03-16 02:48:00 Semiconductor device fabrication Physics Transducers Nanotechnology Mechanical engineering Microelectromechanical systems Deep reactive-ion etching Piezoelectricity Pump Materials science Chemistry Microtechnology
529	Low Temperature Molding for High Space Coverage Microlens Arrays Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington, USA [removed] Abstract This paper presents SF6/ Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2005-03-22 23:30:18 Geometrical optics Lenses Microlens Optical devices Compression molding Integral imaging Molding Camera lens Optical aberration Optics Plastics industry Microtechnology
530	[removed]A DOCKING SYSTEM FOR MICROSATELLITES BASED ON MEMS ACTUATOR ARRAYS* David M. Meller Joel Reiter, Mason Terry, Karl F. Böhringer, Ph.D., Mark Campbell, Ph.D Department of Electrical Engineering Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2001-02-06 21:45:00 Microtechnology Actuators Spacecraft docking and berthing mechanisms Microelectromechanical systems Micromachinery Valve actuator Robotics International Space Station Space rendezvous Spaceflight Technology Spacecraft

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