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Nitrides / Silicon compounds / Oxides / Crystals / Polycrystalline silicon / Silicon oxynitride / Silicon / Temperature / Chemistry / Matter / Ceramic materials


Photon Factory Activity Report 2004 #22 Part BSurface and Interface 3B/2003G296 Si 2p core-level spectra for oxynitride on Si(100) with plasma-excited N2O
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Document Date: 2010-01-05 10:31:25

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