Microsystems Technology Laboratories / MIT Media Laboratory / Media Laboratory / Celanese / Analog Devices / Hitachi / Olin / Interdigital / MIT Microsystems Technology Laboratories / Zyomyx Inc. / Ames / /
Country
United States / /
Currency
USD / / /
Facility
Rensselaer Polytechnic Institute / Stanford University / Pomona College / Media Laboratory / Massachusetts Institute of Technology / University of California / /
National Science Foundation / MIT / University of California / Santa Barbara / Pomona College / Massachusetts Institute of Technology / International Steering Committee for Solid-State Sensors and Actuators / Rensselaer Polytechnic Institute / Stanford University / Bank of England / /
Person
D. Ward / S. Seung / K. Broderick / T. Takacs / V. Diadiuk / B. Teynor / I. Lauer / Martin A. Schmidt / A. Fan / /
Position
Å/rt / constant power driver / ng/rt / Professor of electrical engineering / rt / Presidential Young Investigator / Subject Editor / MEMS Engineer / Director / Assistant Professor of Media Arts / /
182 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 Sub-10 cm3 Interferometric Accelerometer With Nano-g Resolution