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Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY OMNIDIRECTIONAL WALKING MICROROBOT REALIZED BY THERMAL MICROACTUATOR ARRAYS
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Document Date: 2001-08-22 14:51:00


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City

New York / Stockholm / Yokohama / Tokyo / Albuquerque / Pittsburgh / Norwell / San Diego / Chicago / Oiso / /

Company

Distributed Micro Motion Systems / Agilent Co. / Intel Co. / General Motors / John W. Suh Systems / Biomimetic / Micro Robotics Assembly Systems / Xerox / Micro Electro Mechanical Systems / Micromachine Technologies / Microsoft / Tanner Research Inc. / /

Country

Sweden / Japan / /

Currency

pence / /

Facility

Royal Institute of Technology / Stanford Nanofabrication Facility / Electrical Engineering University of Washington Gregory T. A. Kovacs Department / /

IndustryTerm

microcilia array chips / conveyor systems / individual chips / manufacturing process / search method / cilia chips / individual chip / manufacturing / actuator chip / /

Organization

University of Washington / Department of Electrical Engineering Stanford University ABSTRACT An / National Science Foundation / Institute of Technology / Stockholm / University of Washington MEMS / Congress / Karl F. Bohringer Department / Practices Laboratory Xerox Palo Alto Research Center / /

Person

Gregory T. A. Kovacs / Karl F. Bohringer / Matthew H. Mohebbi / Mason L. Terry / /

Position

Hilton Head / integrated controller / cilia controller / controller / /

ProgrammingLanguage

LabView / /

ProvinceOrState

Illinois / New York / New Mexico / Pennsylvania / North Carolina / California / /

Region

Northwest / /

Technology

cilia chips / chip design / MEMS technology / individual chips / Microelectromechanical Systems / microcilia array chips / two chips / actuator chip / /

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