Back to Results
First PageMeta Content
Technology / Transducers / Electromagnetism / Nanotechnology / Electrical engineering / Microelectromechanical systems / Vector / Micromachinery / Microtechnology / Materials science / Actuators


. THEME ARTICLE Computational Methods for Design and Control of MEMS
Add to Reading List

Document Date: 2003-07-05 00:47:00

Open Document

File Size: 345,00 KB

Share Result on Facebook

Company

IBM / /

Currency

pence / USD / /

Facility

mm square / Stanford University / SUH Stanford University / Cornell Nanofabrication Facility / /

IndustryTerm

circuit manufacturing / integrated circuit chips / fabrication technology / unit device / device technology / Experimental devices / array technologies / monolithic microelectromechanical systems / present algorithms / silicon chips / cilia device / manipulation chip / microelectromechanical systems / control software / rotation algorithm / rotation algorithms / /

Organization

Center for Integrated Systems / Stanford University / Mensa / Cornell University / /

Person

GREGORY T.A. KOVACS / BRUCE R. DONALD / KARL F. BÖHRINGER / NOEL C. MACDONALD / /

Position

MEMSA interpreter / Controller / application designer / /

ProgrammingLanguage

Pascal / /

ProvinceOrState

Nebraska / /

Region

Southwest / /

SportsLeague

Stanford University / /

Technology

detailed algorithm / 8 chips / MEMS array technologies / manipulation chip / microelectromechanical systems / MEMS / rotation algorithm / integrated circuit chips / Silicon chips / rotation algorithms / planning algorithm / 3 mm IC chip / Prototype M-Chip / underlying device technology / simulation / device technology / VLSI processors / underlying MEMS device technology / fabrication technology / square-shaped chip / integrated circuit / /

URL

http /

SocialTag