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Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley
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Document Date: 2013-07-27 22:47:54

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File Size: 1,50 MB

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City

Atlanta / /

Company

Pointing Device Head Mounted Display 10 1 Shipping / Analog Devices / Sense Electronics / /

Facility

Computer Sciences University of California / /

IndustryTerm

chemical inertial image temperature / mm2 chip size polysilicon sensors devices / electronics / fabrication technology / /

Organization

Electrical Engineering and Computer Sciences University / University of California / Berkeley / /

Product

Active Suspension / /

ProvinceOrState

California / /

Technology

MEMS / 2 Surface Micromachining IC fabrication technology / 3 Versatile Sensor Technology / /

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