V Contents List of Contributors VII 1

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Date: 2009-09-24 21:03:45 Materials science Radiography Synchrotron LIGA X-ray lithography Microfabrication X-ray Physics Electromagnetic radiation Microtechnology		V Contents List of Contributors VII 1 Add to Reading List Source URL: www.wiley-vch.de Download Document from Source Website File Size: 75,51 KB Share Document on Facebook

	Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures S. Lemkea, J. Goettertb*, T. Holubeka, B. Löchela, I. Rudolpha and T. Seligera a Helmholtz-Zentrum Berlin (HZB) für Materialien und Energie GmbH, DocID: 1s9p8 - View Document
	Heat Load Experiments at CAMD and CLS D. Yemane1, S. Achenbach2, J. Goettert1, R. Guntaka3, D. Haluzan2, K. Nandakumar3, V. Singh1, V. Subramanian2, G. Wells2 1 LSU Center for Advanced Microstructures and Devices (CAMD), DocID: 1rdcU - View Document
	2007 Annual Report nasdaq \| rtec DE A R FE L LOW SH A R EHOL DER S The past year was a challenging one, as semiconductor device manufacturers over-estimated demand, particularly for DocID: 1r5pV - View Document
	Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD) DocID: 1qVW9 - View Document
	Heat Load Experiments at CAMD and CLS D. Yemane1, S. Achenbach2, J. Goettert1, R. Guntaka3, D. Haluzan2, K. Nandakumar3, V. Singh1, V. Subramanian2, G. Wells2 1 LSU Center for Advanced Microstructures and Devices (CAMD), DocID: 1qIzw - View Document