Poly-Sige: A High-Q Structural Material for Integrated RF MEMS

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Date: 2007-03-04 14:11:52 Integrated circuits Silicon RF MEMS Silicon-germanium Electronic design Microelectromechanical systems Resonator Polycrystalline silicon CMOS Chemistry Electronic engineering Physics		Poly-Sige: A High-Q Structural Material for Integrated RF MEMS Add to Reading List Source URL: oxidemems.ece.cornell.edu Download Document from Source Website File Size: 892,02 KB Share Document on Facebook

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