NEW FORMULATION FOR FINITE ELEMENT MODELING ELECTROSTATICALLY DRIVEN MICROELECTROMECHANICAL SYSTEMS

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Date: 2011-11-10 15:06:09 Electrical engineering Mechanical engineering Microelectromechanical systems Microtechnology Technology Engineering Transducers Finite element method Physics		NEW FORMULATION FOR FINITE ELEMENT MODELING ELECTROSTATICALLY DRIVEN MICROELECTROMECHANICAL SYSTEMS Add to Reading List Source URL: d-scholarship.pitt.edu Download Document from Source Website File Size: 2,83 MB Share Document on Facebook

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