2015 TECHNICAL SUMMARIES• WWW.SPIE.ORG MT Conferences: - Microelectromechanical systems - Document - PDFSEARCH.IO

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Date: 2015-05-25 07:54:01 Chemistry Transducers Semiconductor device fabrication RF MEMS Acoustics Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Aluminium nitride EV Group Materials science Technology Microtechnology		2015 TECHNICAL SUMMARIES• WWW.SPIE.ORG/MT Conferences: Add to Reading List Source URL: spie.org Download Document from Source Website File Size: 4,22 MB Share Document on Facebook

	APPLIED PHYSICS LETTERS 95, 103111 共2009兲 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin,1 M. H. Matheny,1 X. L. Feng,1 E. Defaÿ,2 G. Le Rhun,2 C. Marcoux,2 S. H DocID: 1qU0h - View Document
	50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection DocID: 1qAky - View Document
	Paper Title (use style: paper title) DocID: 1qzVz - View Document
	Industry-Academia Workshop on GaN Technology August 9, 10: 00 – 16:00, Technion Zisapel Nanoelectonics Building, seminar room 4th floor. Program 10:00 Opening Remarks, Dan Ritter, Technion, David Rosenfeld, IMOD DocID: 1qgif - View Document
	HexaTech AlN-60 Datasheet, Rev B.indd DocID: 1lXkR - View Document