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Letter pubs.acs.org/NanoLett Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications I. Bargatin,†,‡,§ E. B. Myers,† J. S. Aldridge,†,∥ C. Marcoux,‡ P. Brianceau,‡ L. Duraffou
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Document Date: 2013-03-17 20:38:38
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Letter pubs.acs.org/NanoLett Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications I. Bargatin,†,‡,§ E. B. Myers,† J. S. Aldridge,†,∥ C. Marcoux,‡ P. Brianceau,‡ L. Duraffou