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J. Micro/Nanolith. MEMS MOEMS 6共3兲, 031005 共Jul–Sep 2007兲 Performance-driven optical proximity correction for mask cost reduction Puneet Gupta Blaze DFM, Incorporated
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Document Date: 2010-08-13 22:34:31
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J. Micro/Nanolith. MEMS MOEMS 6共3兲, 031005 共Jul–Sep 2007兲 Performance-driven optical proximity correction for mask cost reduction Puneet Gupta Blaze DFM, Incorporated