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Date: 2011-04-27 13:01:54 Nonmetals Reducing agents Semiconductor device fabrication Oxidizing agents Sputter deposition Oxygen Hydrogen Magnesium hydride Thin film Chemistry Matter Chemical elements		doi:[removed]j.tsf[removed] Add to Reading List Source URL: theochem.org Download Document from Source Website File Size: 225,99 KB Share Document on Facebook

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