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Ion-Assisted Deposition of E-gun Evaporated ITO Films at Low Substrate Temperatures Dale E. Morton, Andreea Dinca, Denton Vacuum LLC, 1259 North Church Street, Moorestown, NJPhone: , FAX: ,
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Document Date: 2013-04-08 22:29:24
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Ion-Assisted Deposition of E-gun Evaporated ITO Films at Low Substrate Temperatures Dale E. Morton, Andreea Dinca, Denton Vacuum LLC, 1259 North Church Street, Moorestown, NJPhone: , FAX: ,