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SISPAD 2012, September 5-7, 2012, Denver, CO, USA Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field L. Filipovic∗† and S. Selberherr∗ ∗ Institute
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Document Date: 2013-02-12 08:39:15
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SISPAD 2012, September 5-7, 2012, Denver, CO, USA Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field L. Filipovic∗† and S. Selberherr∗ ∗ Institute