Water makes wires even more nano: Lab extends meniscus-mask process to make sub-10 nanometer paths - Local oxidation nanolithography - Document - PDFSEARCH.IO

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	Water makes wires even more nano: Lab extends meniscus-mask process to make sub-10 nanometer paths Add to Reading List Document Date: 2015-05-03 17:08:50 Open Document File Size: 371,85 KB Share Result on Facebook Facility Richard E. Smalley Institute / Rice University / / IndustryTerm electronic devices / sacrificial metal mask / fabrication technology / fabrication protocols / / Organization American Chemical Society / Air Force office of Scientific Research / Rice's Richard E. Smalley Institute for Nanoscale Science and Technology / Rice University / Rice / / Person Alexander Slesarev / James Tour / Vera Abramova / / Position professor of materials science / chemist / / Technology semiconductor / lithography / fabrication technology / integrated circuits / fabrication protocols / integrated circuit / / URL www.tcpdf.org / http / SocialTag Nanoelectronics Nanowire Semiconductor device fabrication Etching Integrated circuit Silicon Titanium dioxide Local oxidation nanolithography Chemistry Materials science

Water makes wires even more nano: Lab extends meniscus-mask process to make sub-10 nanometer pathsAdd to Reading List