Optical Characterization Technique for MEMS Comb-Drive Resonators

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Date: 2013-12-11 23:44:29 Microtechnology Linear filters Mechanics Resonance Scattering Waves Microelectromechanical systems Resonator Q factor Physics Electromagnetism Technology		Optical Characterization Technique for MEMS Comb-Drive Resonators Add to Reading List Source URL: www.si-ware.com Download Document from Source Website File Size: 307,21 KB Share Document on Facebook

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