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Kinetic Monte Carlo Approach to Cluster Growth in Magnetron Plasmas ∗ K. Fujioka , L. Rosenthal, S. Wolf, M. Bonitz Institut für Theoretische Physik und Astrophysik der Christian-Albrechts-Universität Kiel, Germany
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Document Date: 2013-03-05 04:29:07
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Kinetic Monte Carlo Approach to Cluster Growth in Magnetron Plasmas ∗ K. Fujioka , L. Rosenthal, S. Wolf, M. Bonitz Institut für Theoretische Physik und Astrophysik der Christian-Albrechts-Universität Kiel, Germany