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Science / Electromagnetism / Microelectromechanical systems / Comb drive / Control theory / MUMPS / State space / Heat equation / RF MEMS / Microtechnology / Actuators / Technology


Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1
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Document Date: 2008-11-17 19:32:17


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City

Cincinatti / Scottsdale / Taipei / /

Company

Robotic Systems / IEEE Intl / Zyvex Corporation / /

Country

Taiwan / /

/

Facility

National Institute of Standards and Technology / Rensselaer Polytechnic Institute / /

IndustryTerm

optical switching systems / bank / analytical tools / years several actuation technologies / /

Organization

National Institute of Standards and Technology / National Science Foundation / Rensselaer Polytechnic Institute / U.S. Department of Commerce / Center for Automation Technologies / /

Person

Mark W. Phipps / Cheng Chang / Corina Nistori / J. Clark J. Demmel / John H. Comtois / David M. Burans / Aaron Geisberger / Kimberly Tuck / Victor M. Bright / W.P. Seering / John T. Wen / Dan O. Popa / Harry Stephanou / Matt Ellis / George Skidmore / /

Position

Singer / N.C. Singer / /

ProgrammingLanguage

MUMPS / /

ProvinceOrState

Ohio / Arizona / /

Technology

MEMS / simulation / actuation technologies / /

URL

www.nsti.org / /

SocialTag