doi:[removed]j.surfcoat[removed]

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Date: 2010-10-06 04:39:30 Thin film deposition Chemical engineering Fluidized bed Chemical vapor deposition Polysilicon hydride Nanoparticle Silicon Solid Powder Chemistry Matter Semiconductor device fabrication		doi:[removed]j.surfcoat[removed] Add to Reading List Source URL: oatao.univ-toulouse.fr Download Document from Source Website File Size: 908,46 KB Share Document on Facebook

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