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Manufacturing / Thin film deposition / Superhard materials / Electron beam / Electron beam induced current / Silicon carbide / Fraunhofer Society / Epitaxy / Micropipe / Chemistry / Semiconductor device fabrication / Materials science


F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 2
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Document Date: 2015-06-08 13:41:42


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