Pergamon Press / J. R. Patel L. C. / Topsil Semiconductor Materials A/S / United Kingdom MEMC Electronic Materials SpA / Electrochemical Society Inc. / /
Country
Italy / /
Currency
USD / / /
Facility
University of Oxford / /
IndustryTerm
oxygen dimer binding energy / activation energy equal / particular processing step / actual device / oxygen binding energy / semiconductor device / maximum interaction energy / device processing / chemical etching / interaction energy / activation energy / greater binding energy / energy / /
Organization
Electrochemical Society / Department of Materials / University of Oxford / /
Person
S. Öberg / Prog / R. Jones / B. Bech Nielsen / F. Berg Rasmussen / J. C. Mikkelsen / Jr. / /
Journal of The Electrochemical Society, 152 共6兲 G460-G467 共2005兲 G460[removed]152共6兲/G460/8/$7.00 © The Electrochemical Society, Inc.