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Mechanics / Elasticity / Actuators / Mechanical engineering / Microelectromechanical systems / Deep reactive-ion etching / Buckling / XYZ / Bending / Materials science / Microtechnology / Physics
Date: 2014-06-10 11:58:56
Mechanics
Elasticity
Actuators
Mechanical engineering
Microelectromechanical systems
Deep reactive-ion etching
Buckling
XYZ
Bending
Materials science
Microtechnology
Physics

Microsoft Word - Paper 3DOF Nanopositioner_D16b_2ndReview05

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