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Debye sheath / Plasma physics / Physics / Plasma


Electron and Ion Dynamics in Radio-Frequency Discharges U. Czarnetzki Frontiers in Plasma Science 2014 National Institute for Fusion Science, Toki / Japan
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Document Date: 2014-08-07 17:07:20

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File Size: 3,66 MB

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Company

CCP / /

Country

Japan / /

IndustryTerm

Large area processing discharges / semiconductor processing / gas pressure / energy distribution / /

Organization

National Institute for Fusion Science / Institute for Plasma and Atomic Physics / Max-Plank-Institut für Plasmaphysik / /

Person

Julian Schulze / Ralf Schneider / Uwe Czarnetzki / /

ProvinceOrState

Pennsylvania / /

Region

North Rhine / /

Technology

semiconductor / radio frequency / /

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