References References 163

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Date: 2009-12-03 00:39:18 Coatings Amorphous solids Plasma processing Semiconductor device fabrication Amorphous carbon Amorphous silicon Diamond-like carbon Sputter deposition Carbon Chemistry Matter Thin film deposition		References References 163 Add to Reading List Source URL: dspace.fsktm.um.edu.my Download Document from Source Website File Size: 163,11 KB Share Document on Facebook

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