PECVD HYDROGENATED AMORPHOUS CARBON FILMS: GROWTH AND CHARACTERIZATION ROZIDAWATI BINTI AWANG

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Date: 2009-12-03 00:39:18 Semiconductor device fabrication Physics Manufacturing Vacuum Coatings Chemical vapor deposition Plasma-enhanced chemical vapor deposition Spectroscopy Thin film Chemistry Thin film deposition Plasma processing		PECVD HYDROGENATED AMORPHOUS CARBON FILMS: GROWTH AND CHARACTERIZATION ROZIDAWATI BINTI AWANG Add to Reading List Source URL: dspace.fsktm.um.edu.my Download Document from Source Website File Size: 543,71 KB Share Document on Facebook

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