Date: 2011-06-02 13:26:46Engineering Electromagnetism Transducers Physics Signal processing filter Energy conversion Energy harvesting Piezoelectricity Aluminium nitride Crystal oscillator Quartz crystal microbalance Resonator | | APPLIED PHYSICS LETTERS 95, 103111 共2009兲 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films R. B. Karabalin,1 M. H. Matheny,1 X. L. Feng,1 E. Defaÿ,2 G. Le Rhun,2 C. Marcoux,2 S. HAdd to Reading ListSource URL: nano.caltech.eduDownload Document from Source Website File Size: 572,65 KBShare Document on Facebook
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