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Startup Procedure •Log into FOM •Before lighting the plasma, checkArgon pressure (in hallway) ~90psi 2. Water circulator (in hallway) ~20ºC 3. Exhaust (inside instrument)
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Document Date: 2011-09-20 18:32:03
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Startup Procedure •Log into FOM •Before lighting the plasma, checkArgon pressure (in hallway) ~90psi 2. Water circulator (in hallway) ~20ºC 3. Exhaust (inside instrument)