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Superhard materials / Diamond / Abrasives / Semiconductor device fabrication / Thin film deposition / Synthetic diamond / Chemical vapor deposition of diamond / Chemical vapor deposition / Microelectromechanical systems / Chemistry / Manufacturing / Matter


Document Date: 2012-04-20 11:04:18

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City

J. E / Houston / Hilton Head Island / /

Company

Carlisle / Naval Research Laboratory / Naval Research/Naval Research Laboratory / K. H. Chen L. C. / Micro Electro Mechanical Systems / /

Country

United States / /

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IndustryTerm

thermal management applications / nano lithographic/processing techniques / diamond chemical vapor deposition / electrical carrier scattering / chemical vapor deposition / conductive applications / harsh chemical / optical applications / quantum computing / carrier mobility / /

Organization

office of Naval Research/Naval Research Laboratory / /

Person

J. M. Parpia / J. N. Russell / Jr. / B. H. Houston / H. Windischmann / J. S. Colton / L. Sekaric / Island / Diam / S. Chattopadhay / J. Appl / R. J. Hamers / James E. Butler / Apollo Diamond / T. L. Lasseter / Stoner / T. Wikstrom / H. G. Craighead / W. Cai / J. F. Evans / E. Johansson / D. J. Twitchen / A. J. Whitehead / J. Phys / S. E. Coe / G. A. Scarsbrook / R. C. Linares / T. Feygelson / J. E. Butler / L. M. Smith / P. J. Doering / /

Position

Author / D. J. / BUTLER / Acknowledgments The author / /

ProvinceOrState

South Carolina / /

PublishedMedium

Nature Materials / /

Technology

radiation / cryptography / laser / microwave / lithography / CVD / chemical vapor deposition / /

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