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Photon Factory Activity Report 2004 #22 Part BSurface and Interface 2C/2002S2-002 Crystallization in HfO2 gate insulators with in situ annealing
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Document Date: 2010-01-05 10:31:27
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Photon Factory Activity Report 2004 #22 Part BSurface and Interface 2C/2002S2-002 Crystallization in HfO2 gate insulators with in situ annealing