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Finite-element simulation models and experimental verification for through-silicon-via etching: Bosch process and single-step etching Zihao Ouyang, Wenyu Xu, D. N. Ruzic, Mark Kiehlbauch, Alex Schrinsky, and Kevin Torek
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Document Date: 2015-04-22 08:46:33
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File Size: 3,95 MB
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Finite-element simulation models and experimental verification for through-silicon-via etching: Bosch process and single-step etching Zihao Ouyang, Wenyu Xu, D. N. Ruzic, Mark Kiehlbauch, Alex Schrinsky, and Kevin Torek