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Results: 86

#	Item
41	Improving the quality of barrier/seed interface by optimizing physical vapor deposition of Cu Film in hollow cathode magnetron A. Dulkin, E. Ko, L. Wu, I. Karim, K. Leeser et al. Citation: J. Vac. Sci. Technol. A 29, 041 Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
42	Etching mechanism of the single-step through-silicon-via dry etch using SF6/C4F8 chemistry Zihao Ouyang, D. N. Ruzic, Mark Kiehlbauch, Alex Schrinsky, and Kevin Torek Citation: Journal of Vacuum Science & Technology A 32 Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:33
43	IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 40, NO. 4, APRILVisual and Electrical Evidence Supporting a Two-Plasma Mechanism of Vacuum Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
44	JOURNAL OF APPLIED PHYSICS 103, 044901 共2008兲 Preliminary evidence of field induced rhenium etching by XeF2 at high vacuum C. H. Castano Giraldo,1,a兲 M. Aghazarian,2 and D. N. Ruzic2 1 Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:31
45	Thermocapillary and thermoelectric effects in liquid lithium plasma facing components Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
46	Debris transport analysis at the intermediate focus of an extreme ultraviolet light source John Sporre David N. Ruzic Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
47	PDF Document Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
48	730 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 40, NO. 3, MARCH 2012 Laboratory Investigation of Vapor Shielding for Lithium-Coated Molybdenum in Devex Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
49	PRL 104, PHYSICAL REVIEW LETTERS week ending 5 MARCH 2010 Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32
50	SCT-18013; No of Pages 4 Surface & Coatings Technology xxxxxx–xxx Contents lists available at SciVerse ScienceDirect Surface & Coatings Technology Add to Reading List Source URL: cpmi.illinois.edu Language: English - Date: 2015-04-22 08:46:32