| Document Date: 2014-11-24 09:54:55
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City Valencia / Hamburg / Paris / / Company ALD FILMS / Al2O3 Films / Levitech B.V. / / / Facility Levitrack reactor / Levitrack Spatial ALD reactor / / IndustryTerm gas flow / inert gas / highvolume manufacturing / inert gas supplies / manufacturing / high-volume manufacturing / mature technology / / Organization European Commission / European Fund for Regional Development / Ministry of Economic Affairs / Agriculture and Innovation / / Person S.M. George / V / P. Vermont / V / P.G. Vermont / V / Al Pa / / Position CoO / / Product H2O injection / Al2O3 As / / ProvinceOrState Flevoland / / Technology semiconductor / laser / dielectric / mature technology / ATM / recombination / /
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29th European Photovoltaic Solar Energy Conference and Exhibition OPTIMIZATION OF AL2O3 BACKSIDE PASSIVATION INTO MASS PRODUCTION P.V. Vermont, E.H.A. Granneman, J.H.M. Beijersbergen*,