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Technology / Microelectromechanical systems / Piezoelectricity / Bimorph / Cantilever / Comb drive / Micro-Opto-Electro-Mechanical Systems / Torsion spring / Resonance / Microtechnology / Materials science / Physics


LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1
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Document Date: 2003-11-07 11:50:11


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File Size: 1,10 MB

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