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ALTAIR The Brightest Solution To Pyrophorics System Description The Altair is a passive gas treatment device designed to effectively treat effluent gases from semiconductor process tools. These costeffective units are em
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Document Date: 2013-10-15 04:13:46

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File Size: 1,03 MB

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Facility

Facility Requirements Gas Inlets Exhaust Outlet Power Exhaust System / Door Interlock Switch Removable Cleanout Door Removed Operator Interface Terminal / /

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IndustryTerm

gas inlet nozzles / passive gas treatment device / semiconductor process tools / gas nozzle inlet / gas inlet nozzle / gas treatment device / /

NaturalFeature

Air inlet / West Coast / East Coast / /

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Position

Programmable Logic Controller / /

Region

West Coast / East Coast / /

Technology

semiconductor / CVD / /

URL

www.enviro-matrix.com / /

SocialTag